发明名称 |
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE WITH PROTECTION LAYER |
摘要 |
A method for manufacturing a semiconductor device may comprise preparing a wafer having a front surface and a back surface. The wafer may have a plurality of semiconductor chips and scribe lines between the adjacent semiconductor chips. The wafer may be sawn along the scribe lines to form grooves between the adjacent semiconductor chips. A liquid protection material may be screen printed or spin-coated to form a protection layer on the back surface and within the grooves. The protection layer within the grooves may be more narrowly cut to form individual semiconductor devices and to leave a protection layer remaining thereon.
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申请公布号 |
US2007190688(A1) |
申请公布日期 |
2007.08.16 |
申请号 |
US20060565901 |
申请日期 |
2006.12.01 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
YOUN HAN-SHIN;MOK SEUNG-KON;JUNG YOUNG-DOO |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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