发明名称 |
MOLD, IMPRINT METHOD, AND PROCESS FOR PRODUCING CHIP |
摘要 |
A mold capable of a highly accurate alignment with a member to be processed in such a state that a photocurable resin material is disposed between the mold and the member to be processed, and is constituted by a substrate 2010 formed of a first material and an alignment mark 2102 formed of a second material different from the first material. The first material and the second material have transmissivities to light in a part of an ultraviolet wavelength range. The second material has a refractive index of not less than 1.7.
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申请公布号 |
US2007187875(A1) |
申请公布日期 |
2007.08.16 |
申请号 |
US20060468876 |
申请日期 |
2006.08.31 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
TERASAKI ATSUNORI;SEKI JUNICHI;SUEHIRA NOBUHITO;INA HIDEKI;OKUSHIMA SHINGO |
分类号 |
B29C35/08 |
主分类号 |
B29C35/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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