| 摘要 |
A conductive sheet is provided to improve a step coverage of a deposition film by increasing an electric conductivity of a side conductive layer, which is formed on a side surface of a hole. A conductive sheet includes a sheet type substrate, a punch hole or a cutting slit, upper and lower conductive layers, and a connection conductive layer. A sheet resistance ratio between the surface conductive layer and the connection conductive layer is greater than 0.02. A ratio of a thickness of the surface conductive layer with respect to a thickness of the connection conductive layer is smaller than 50. The conductive layer is a metal alloy film having a thickness between 20 nanometers and 5 micrometers. A horizontal cross-sectional size of the connection conductive layer is greater than 20um^2/cm^2. Before the connection conductive layer is deposited, a portion of a normal line on a surface of the connection conductive layer forms a diagonal line with respect to upper and lower sustains. Alternatively, a ratio between a depth of the hole and a width of the hole is smaller than 10.
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