MANUFACTURING METHOD OF LIQUID CRYSTAL DISPLAY

摘要

A method for manufacturing an LCD(Liquid Crystal Display) is provided to simplify the manufacturing process, by performing a polysilicon thin film patterning process and an impurity doping process for forming a lower storage electrode through one mask so as to decrease the number of mask used to manufacture the LCD. A polysilicon thin film(7) is formed on an insulating substrate(30). A photoresist pattern(60) is formed on the polysilicon thin film. The polysilicon thin film is pattern-etched by using the photoresist pattern as a mask. A portion of the photoresist pattern is removed. Impurities are doped in a portion of the polysilicon thin film, which are exposed by removing the portion of the photoresist pattern. The photoresist pattern has a stepped portion due to difference of thickness, wherein the photoresist pattern is formed by using a diffraction exposure mask.