| 摘要 |
PROBLEM TO BE SOLVED: To supply a liquid material containing small amounts of bubbles, especially a liquid material containing few bubbles of diameters larger than a specified value, to a to-be-coated member. SOLUTION: A liquid material supplying apparatus is equipped with a pressure tank applying a positive pressure higher than the atmospheric pressure to a liquid material, a syringe having a nozzle discharging the liquid material and a passage member forming a passage through which the liquid material is passed from the pressure tank to the syringe. It also has a valve member arranged on the way of the passage member to open and close the passage, a bubble removing filter arranged on the way of the passage member between the syringe and the valve member to remove bubbles from the liquid material flowing through the passage member and a pressure-applying mechanism which applies the first pressure higher than the atmospheric pressure or the second pressure lower than the first pressure selectively to the inside of the syringe so as to start or stop the discharge of the liquid material by the nozzle. COPYRIGHT: (C)2007,JPO&INPIT |
