| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inertial force sensor for detecting a plurality of inertial forces different in angular velocities or acceleration etc., capable of detecting the inertial forces of a plurality of detector axes, or capable of miniaturizing various electronic equipment. <P>SOLUTION: The inertial sensor is provided with the detector element 1 for detecting the inertial force. The detector element 1 is provided with two orthogonal axis type arms formed by approximately orthogonally connecting the first arm 2 and second arm 4, and the supporting part 8 for supporting two first arms 2, and two fixing arms 10 connecting to the supporting part 8 with one end and to the mounted substrate (not illustrated) with the other end. The fixing arm 10 is a orthogonal axis type arm formed by connecting the third arm 12 to the fourth arm 14 approximately in a orthogonal direction, and both ends of the fourth arm 14 are bent so as to oppose to the third arm 12, and fixed to the mounted substrate at both the ends of the fourth arm 14. <P>COPYRIGHT: (C)2007,JPO&INPIT |
