发明名称 APPARATUS FOR SLICING INGOT
摘要 An ingot slicing apparatus is provided to form a plurality of sheets of silicon substrates and to minimize slicing loss of an ingot by performing an ingot slicing process once. A plurality of wires(120) are formed to surround one side of a main roller(110). A plurality of pieces of diamond are attached to the plurality of wires to slice a cylindrical ingot. A plurality of reels(130) are disposed apart from the main roller to adjust tension of each of the wires. The wires are wound around the reels. A driving unit rotates the reels to move the wires in a longitudinal axis of the ingot. A diameter of the main roller is larger than a diameter of the ingot. The reels are arranged in a diagonal direction to adjust a gap between the wires.
申请公布号 KR20070080008(A) 申请公布日期 2007.08.09
申请号 KR20060011022 申请日期 2006.02.06
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HAN, SHIN HYEOK;CHO, KYOO CHUL;KIM, HEE SUNG;KIM, YEON SOOK;KOO, TAE HYOUNG
分类号 H01L21/301 主分类号 H01L21/301
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