发明名称 Torsional electrostatic actuator
摘要 Multiple drives are coupled together to cause rotation about a single axis by an arrangement in which two moveable electrode plates flank a fixed electrode plate such that the opposite direction rotations of the two moveable electrode plates are combined. To this end, at least one arm from at least one of the moveable electrode plates is connected to at least one arm of a moveable electrode plate on the opposite side of the fixed electrode plate, e.g., by a spring. The electrode plates may have comb projections. A post may be coupled at one of its ends to the top of one of the moveable electrode plates, and the post's other end is coupled to a plate, e.g., a mirror or other structure to be moved.
申请公布号 US7253550(B2) 申请公布日期 2007.08.07
申请号 US20050140313 申请日期 2005.05.27
申请人 LUCENT TECHNOLOGIES INC. 发明人 AKSYUK VLADIMIR ANATOLYEVICH;SIMON MARIA ELINA
分类号 H02N1/00;G02B26/08 主分类号 H02N1/00
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