摘要 |
PROBLEM TO BE SOLVED: To prevent a silicon substrate, which is materially fragile, from cracking or chipping and to prevent the generation of the dusts thereon in the process of manufacturing magnetic disks. SOLUTION: A magnetic disk substrate using the silicon substrate has a ski-jump value H<SB>0</SB>shown by H<SB>0</SB>≤0μm and representing the distance from a basal level T to a point A<SB>3</SB>, a roll-off value H<SB>1</SB>shown by -0.2μm≤H<SB>1</SB>≤0.0μm and representing the distance from the basal level T to a point A<SB>1</SB>, a dub-off value H<SB>2</SB>shown by 0μm≤H<SB>2</SB>≤0.012μm and representing the maximum displacement of the border line of the main surface with respect to the line bonding the points A<SB>l</SB>and A<SB>2</SB>, curved surfaces provided between the main surfaces and the chamfered surfaces and the curvature radius R of the curved surface shown by 0.013 mm≤R≤0.080 mm. COPYRIGHT: (C)2007,JPO&INPIT
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