MANUFACTURING METHOD OF ELEMENT FOR EVALUATING CHARACTERISTIC OF INTER-WIRE INSULATION FILM

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of accurately measuring and evaluating characteristics of an inter-wire insulation film.

SOLUTION: The manufacturing method for the element used for evaluating the characteristics of the inter-wire insulation film 7 includes an easily etched film forming step of providing an easily etched film 3, more easily etched than the inter-wire insulation film, onto a substrate 1 to form a conductive film groove 3a; a conductive film groove forming step of etching the easily etched film 3 provided in the easily etched film forming step; a conductive film forming step of providing a conductive film 6 to the conductive film groove 3a formed in the conductive film groove forming step; a removal step of removing the easily etched film 3 existing between the conductive films 6 by etching after the conductive film forming step; and an inter-wire insulation film forming step of providing the inter-wire insulation film 7 to a groove 3b formed in the removal step after the removal step.

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