| 摘要 |
PROBLEM TO BE SOLVED: To provide an electricity removing system in non-contact sheet-conveyance, which is capable of effecting highly accurate electricity removing operation at any time when a conveyance object is charged. SOLUTION: An ionizer 2 is installed on the way of an air pipe line for supplying air to an air levitation stage 1. The ionizer 2 is constituted so that an ionizing source 22 is received in a tubular chamber 21 and air or non-reactive gas is supplied into the chamber 21 through a clean air supplying port 23 provided at one end of the chamber 21, while ionized air can be blown out of a blow-out port 24 provided at the other end of the chamber 21. A shielding plate 25 is provided at the inside of the blow-out port 24. On the other hand, the front surface of the air levitation stage 1 is provided with a blow-out port 13 for blowing out high-pressure air, and a suction port 14 for attracting a glass substrate 11 by suction. In this case, air or gas is ionized by the ionizer 2 to supply to the air levitation stage 1, and the ionized air is blown uniformly against the rear side of a large-size glass substrate 11 through the air levitation stage 1. COPYRIGHT: (C)2007,JPO&INPIT
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