| 摘要 |
PROBLEM TO BE SOLVED: To provide an economical and alternative technology manufacturing a single crystal having an iron concentration not higher than 1×10<SP>9</SP>atom/cm<SP>3</SP>and not exceeding 1×10<SP>9</SP>atom/cm<SP>3</SP>even at the edge zone of the single crystal and the edge zone of the disk separated from the single crystal. SOLUTION: An elastic seal 12 is provided, and the elastic seal 12 seals a gap 11 between an inside wall 9 and a heat insulating material 10, and an obstacle preventing the transportation of a gaseous iron carbonyl to the single crystal 3. COPYRIGHT: (C)2007,JPO&INPIT |
