A portable microwave plasma discharge unit (12) receives microwaves and a gas flow via a supply line (16). The portable microwave plasma discharge unit (12) generates plasma (14) from the gas flow and the received microwaves. The portable microwave plasma discharge unit (12) includes a gas flow tube (42) made of a conducting and/or dielectric material and a rod-shaped conductor (44) that is axially disposed in the gas flow tube (42). The rod-shaped conductor (44) has an end configured to contact a microwave supply conductor (66) of the supply line (16) to receive microwaves and a tip (46) positioned adjacent the outlet portion of the gas flow tube (42). The tip (46) is configured to focus the microwaves received from the microwave supply conductor (66) to generate plasma (14) from the gas flow.
申请公布号
WO2007013875(A3)
申请公布日期
2007.08.02
申请号
WO2005US28775
申请日期
2005.08.11
申请人
AMARANTE TECHNOLOGIES, INC.;NORITSU KOKI CO., LTD.;LEE, SANG, HUN;KIM, JAY, JOONGSOO