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发明名称
移除蚀刻残留物之方法及所使用之化学物质
摘要
本发明系阐述一种尤其藉由自半导体结构移除蚀刻残留物(例如聚合物或颗粒)而用于清洗之方法及一种清洗化学物质。该清洗方法包括将其上带有蚀刻残留物颗粒之半导体结构置于化学物质中以移除该颗粒,其中该化学物质之活性组份系由具有相等数量之COOH及OH基团之羧酸组成。在一实施例中,该羧酸系酒石酸。在一实施例中,该化学物质进一步包括水。
申请公布号
TW200729326
申请公布日期
2007.08.01
申请号
TW095138676
申请日期
2006.10.20
申请人
飞思卡尔半导体公司
发明人
博高文K 夏玛
分类号
H01L21/306(2006.01)
主分类号
H01L21/306(2006.01)
代理机构
代理人
陈长文
主权项
地址
美国
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