| 摘要 |
Interdigital transducer portion for a surface acoustic wave device, where first base layers (20) made of TiN or titanium oxynitride i.e. TiO x N y , (where, 0 < x < 0.2, x + y = 1) and second base layers (21) made of Cr are provided between interdigital transducer portions (22) and a piezoelectric (12) substrate, and accordingly, it is possible to prevent voids from being generated in the interdigital transducer portions, which improves a power resistance of the surface acoustic wave device. In addition, since it is possible to prevent the voids from being generated in the interdigital transducer portions, it is possible to suppress the resistance of the interdigital transducer portions from increasing, which can reduce the loss of power. In addition, it is also possible to reduce the variations in a serial resonance frequency and a parallel resonance frequency. |
