APPARATUS FOR BEAD IN THE EDGE OF A SEMICONDUCTOR WAFER,申请号KR20050131649-传众专利搜索

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发明名称	APPARATUS FOR BEAD IN THE EDGE OF A SEMICONDUCTOR WAFER
摘要
申请公布号	KR100744277(B1)	申请公布日期	2007.07.30
申请号	KR20050131649	申请日期	2005.12.28
申请人		发明人
分类号	H01L21/3063;H01L21/027	主分类号	H01L21/3063
代理机构		代理人
主权项
地址

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