发明名称 POSITION CONTROL METHOD FOR A PLATE FLOATED BY AIR CUSHION
摘要 A method for controlling position of a plate in plate transfer units of air lifting type is provided to collect discharged air at a center of the plate by arranging the plate transfer units in a transfer direction at regular intervals. A pair of plate transfer units(110) are symmetrically disposed on the basis of a center of a plate in such a way that a portion of a nozzle(121) is positioned at a vertical lower portion of an external end of the plate. The plate transfer units are arranged at regular intervals along a transfer direction of the plate to discharge air towards the center of the plate. When the plate enters, the opposite plate transfer units are simultaneously operated so that the plate is automatically aligned towards the center of a transfer line.
申请公布号 KR100745029(B1) 申请公布日期 2007.07.26
申请号 KR20060041904 申请日期 2006.05.10
申请人 LEE, GI SEON;KIM, YEONG MUK 发明人 LEE, GI SEON;KIM, YEONG MUK;CHANG, YOUNG BAE
分类号 H01L21/68 主分类号 H01L21/68
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