SUBSTRATE PROCESSING DEVICE, LICENSE MANAGEMENT PROGRAM, LICENSE INFORMATION PROVISION DEVICE, LICENSE INFORMATION PROVISION PROGRAM, LICENSE MANAGEMENT SYSTEM AND RECORDING MEDIUM

摘要

A substrate processing device for processing a substrate under software control. The substrate processing device comprises a license information receiving means for regularly receiving license information on the software from a license information provision device connected via a network, a license information analyzing means for extracting the address information of the license information provision device on the network from the license information and a license judging means for comparing the address information extracted from the license information with the address information of the license information provision device pre-stored in the substrate processing device. If the values of the two address information do not match, the execution of at least part of the function of the software is limited. Thus, unauthorized use of the software running on the substrate processing device is properly prevented.