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发明名称
摘要
申请公布号	JP3948949(B2)	申请公布日期	2007.07.25
申请号	JP20010374299	申请日期	2001.12.07
申请人		发明人
分类号	H01L21/28;H01S5/042;H01S5/323;H01S5/343	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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