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摘要
申请公布号
JP3950177(B2)
申请公布日期
2007.07.25
申请号
JP19940111690
申请日期
1994.04.28
申请人
发明人
分类号
C23C14/48;H01L21/265;H01J37/317;H01J37/32
主分类号
C23C14/48
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