| 摘要 |
A cassette ( 1 ) for holding and transporting substrates includes a chassis ( 11 ), a pair of supporting walls ( 30 ) facing each other, a pair of first pivot elements ( 40 ), and a pair of second pivot elements ( 42 ). The first and second pivot elements are pivotally connected to the chassis and supporting walls, respectively. Each of the supporting walls includes a plurality of supporting members ( 301 ) protruding inwardly therefrom. The chassis and the supporting walls define a space for accommodating the substrates on the supporting members. A distance between the supporting walls can be easily adjusted by pivoting the pivot elements. Thus the space defined by the chassis and the supporting walls is adjusted accordingly, in order to accommodate substrates of a particular size. The cassette is adaptable for use with substrates of various sizes simply by pivoting the pivot elements.
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