| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an LED element which emits light of a complex wavelengths using simplified processes without using an adhesive or the like, wherein the LED element uses an LED chip emitting ultraviolet light or blue light, and the light of the complex wavelengths is such light as white light and various light of a single wavelength, or such light as mixed with these light of the single wavelength. <P>SOLUTION: A mask pattern to mask an electrode pad on the LED chip is formed, and a fluorescent film is thin and evenly deposited on the LED chip using Pulsed DC, an RF sputtering method or a PLD method. The sputtering method and the PLD method are used to deposit the fluorescent film fabricating a target of such as a sputtering process using a substance in which a fluorescent material is mixed with SiO2 or SiO. The LED element emitting the light of the complex wavelength is manufactured by removing the mask pattern after depositing the fluorescent film. <P>COPYRIGHT: (C)2007,JPO&INPIT |
