发明名称 Alignment using latent images
摘要 Systems and techniques for alignment with latent images. In one implementation, a method includes detecting a location of a latent image on a substrate, repositioning the substrate based on the detected location of the latent image, and patterning the substrate.
申请公布号 US7245352(B2) 申请公布日期 2007.07.17
申请号 US20040895651 申请日期 2004.07.20
申请人 INTEL CORPORATION 发明人 BORODOVSKY YAN;GRODNENSKY ILYA
分类号 G03B27/32;G03B27/54 主分类号 G03B27/32
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