| 摘要 |
The present invention provides an apparatus and method for measuring the angular rotation of a moving body. The apparatus comprises an upper sensor layer, a lower handle layer substantially parallel to the sensor layer, at least one dither frame formed of the upper sensor layer, the frame having a dither axis disposed substantially parallel to the upper sensor layer and the lower handle layer. The apparatus further comprises a first accelerometer formed of the upper sensor layer and having a first force sensing axis perpendicular to the dither axis for producing a first output signal indicative of the acceleration of the moving body along the first force sensing axis, the first accelerometer having a proof mass and at least one flexure connecting the proof mass to the dither frame such that the proof mass can be electrically rotated perpendicular to the dither axis. The apparatus also comprises a second accelerometer formed of the upper sensor layer and having a second force sensing axis perpendicular to the dither axis for producing a second output signal indicative of the acceleration of the moving body along the second force sensing axis, the second accelerometer having a proof mass and at least one flexure connecting the proof mass to the dither frame such that the proof mass can be electrically rotated perpendicular to the dither axis. The dither frame and proof masses have electrodes on an insulating layer for operating the first and second accelerometers and the upper sensor layer has a rate axis perpendicular to each of the first and second force sensing axes and the dither axis, whereby the first and second output signals have a Coriolis component indicative of the angular rotation of the moving body about the rate axis.
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