| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a film-forming composition for forming an insulation film having good film characteristics such as dielectric constant, barrier properties against metal diffusion, to provide an insulation film obtained by using the film-forming composition and an electronic device equipped with the insulation film. <P>SOLUTION: This film-forming composition contains a polymer of a compound expressed by general formula (I): (X)<SB>m</SB>-Q-(Y)<SB>n</SB>, wherein Q represents five- or six-membered nitrogen-containing heterocycle; X represents an arbitrary substituent; m denotes an integer of 0-10; n denotes an integer of 1-10; and Y represents a prescribed group. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
