| 摘要 |
A substrate transfer apparatus and a substrate support body are provided to keep a substrate in a horizontal state regardless of the size of the substrate by using a tilted pick. A substrate transfer apparatus includes a substrate support body, a transfer arm, and a deriving unit. The substrate support body includes a plurality of picks(202) connected to a common pick base(201). The picks are tilted respectively. The substrate support body is used for supporting a substrate. The transfer arm is used for supporting the substrate support body. The transfer arm is capable of moving to and fro. The driving unit is used for driving the transfer arm. The height of a front end portion is larger than that of a rear end portion in the pick.
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