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发明名称
Träger für einen Wafer, Verfahren zum Herstellen eines Trägers und Verfahren zum Handhaben eines Wafers
摘要
申请公布号
DE10339997(B4)
申请公布日期
2007.07.12
申请号
DE20031039997
申请日期
2003.08.29
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
BLEIER, MARTIN;LANDESBERGER, CHRISTOF;HEMMETZBERGER, JOHANN DIETER
分类号
H01L21/68;H01L21/66;H01L21/683
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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