发明名称 Gallium lanthanide oxide films
摘要 Electronic apparatus and methods of forming the electronic apparatus include a gallium lanthanide oxide film for use in a variety of electronic systems. The gallium lanthanide oxide film may be structured as one or more monolayers. The gallium lanthanide oxide film may be formed using atomic layer deposition.
申请公布号 US2007158765(A1) 申请公布日期 2007.07.12
申请号 US20060329025 申请日期 2006.01.10
申请人 MICRON TECHNOLOGY, INC. 发明人 AHN KIE Y.;FORBES LEONARD
分类号 H01L29/78;H01L21/8234 主分类号 H01L29/78
代理机构 代理人
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