Capacitive micromachined ultrasonic transducer (cMUT) and its production method

摘要

A capacitive micromachined ultrasonic transducer (cMUT) at least including a silicon substrate, a bottom electrode mounted onto the silicon substrate, a upper electrode mounted facing the bottom electrode and apart therefrom by a predetermined cavity, and a membrane supporting the upper electrode, wherein a part of the aforementioned cMUT is charged.