摘要 |
There is provided a piezoelectric ceramic having a wider operating temperature range, being capable of obtaining a larger amount of displacement, being easily sintered, and being superior in terms of low emission, environment and ecology. A piezoelectric substrate ( 1 ) includes (1-m-n){(Na<SUB>1-x-y</SUB>K<SUB>x</SUB>Li<SUB>y</SUB>)(Nb<SUB>1-z</SUB>Ta<SUB>z</SUB>)O<SUB>3</SUB>}+m{(M1)ZrO<SUB>3</SUB>}+n{M2(Nb<SUB>1-w</SUB>Ta<SUB>w</SUB>)<SUB>2</SUB>O<SUB>6</SUB>} as a main component. M1 and M2 each represent an alkaline-earth metal element, and the values of x, y, m and n are preferably within a range of 0.1<=x<=0.9, 0<=y<=0.1, 0<m<0.1 and 0<n<=0.01, respectively. Thereby, a higher Curie temperature and a larger amount of displacement can be obtained, and sintering can be more easily performed. At the time of sintering, after (M1) ZrO<SUB>3 </SUB>is formed, other materials are mixed.
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