| 摘要 |
PROBLEM TO BE SOLVED: To provide a small and thin electromagnetic induction component which can ensure a large number of turns per area and is excellent in heat dissipation. SOLUTION: A first substrate 10 and a second substrate 20 each consisting of a semiconductor substrate are stacked. A plurality of first linear patterns 11 and second patterns 21 each made of a conductor layer are juxtaposed on one surface in the thickness direction of each of the coil substrates 10, 20. The first substrate 10 is provided with a connection 12 as a piercing conductor electrically connected to both ends of the first pattern 11, and pierces through the first substrate 10. The connection 12 is connected to the second pattern 21 by stacking the first substrate 10 and the second substrate 20, and a spiral winding is formed by the first pattern 11, the second pattern 21, and the connection 12. Grooves 13 are formed between each pairs of adjacent first patterns 11 on one surface where the first patterns 11 are formed on the first substrate 10. COPYRIGHT: (C)2007,JPO&INPIT
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