| 摘要 |
PROBLEM TO BE SOLVED: To stabilize the contact of a probe pin with an electrode without reducing the heating temperature of a substrate even when a prober frame is deformed by thermal expansion and the position of the probe pin varies. SOLUTION: A prober for inspecting a liquid crystal substrate for supplying an inspection signal to the liquid crystal substrate 10 has a constitution where a plurality of probe pins 3 are disposed in the prober frame 2 constituting the prober 1. Each probe pin 3 has a main probe pin 4 having one contact point and a sub-probe pin 5 having a plurality of contact points, and the contact point of the main probe pin 4 is electrically connected to the contact points of the sub-probe pin 5. Even when positional displacement is caused by thermal expansion between the contact point of the main probe pin and an electrode on the liquid crystal substrate side, any of the plurality of contact points included in the sub-probe pin comes into contact with an electrode on the liquid crystal substrate side. COPYRIGHT: (C)2007,JPO&INPIT
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