PATTERNING METHOD, AND METHOD OF MANUFACTURING ELECTROOPTICAL DEVICE, COLOR FILTER, LIGHT EMITTER AND THIN-FILM TRANSISTOR

摘要

PROBLEM TO BE SOLVED: To form a pattern comprising liophilic parts and liophobic parts by a simple process as compared with a conventional one.

SOLUTION: This patterning method is characterized by comprising: a surface treatment step of exposing a surface of a workpiece 20 to an atmosphere containing at least one kind selected from hydrogen, deuterium, deutrated hydrogen and tritium; an exposure step of partially exposing the surface of the workpiece to light after the surface treatment process to form exposed parts 25 and non-exposed parts; and a step of providing a liquid 24 to the exposed parts 25 or the non-exposed parts of the workpiece.

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