| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film capacitor capable of surely preventing a capacitor dielectric film from being reduced by hydrogen and water content, as well as a manufacturing method thereof, an electronic equipment using the same, and a circuit board. <P>SOLUTION: The thin film capacitor comprises a capacitor device 20 which is formed on a support substrate 10 and comprises a first capacitor electrode 14, a capacitor dielectric film 16 formed on the first capacitor electrode, and a second capacitor electrode 18 formed on the capacitor dielectric film. It also comprises drawn-out electrodes 26a and 26b consisting of a conductive barrier film that prevents diffusion of hydrogen or water content and is drawn out of the first capacitor electrode or second capacitor electrode, and external connection electrodes 34a and 34b connected to the drawn-out electrodes. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
