| 摘要 |
PROBLEM TO BE SOLVED: To efficiently remove a coating solution existing at the tip end part of a discharge nozzle by a simple facility without using a large quantity of a washing liquid. SOLUTION: A rotation roller 11 for holding a coating solution 22 discharged out of a slit type discharge port 21 at the tip of a discharge nozzle 20 is installed while being kept from the discharge nozzle and a blade 12 for removing the coating solution held on the outer circumferential face of the rotation roller is installed in a reciprocating manner in the axial direction of the rotation roller and a washing liquid supply apparatus 15 for supplying a washing liquid 14 to the outer circumferential face of the rotation roller is installed downstream of the blade in the rotation direction of the rotation roller. In a step of removing the coating solution from the rotation roller by the blade, the washing liquid supply to the rotation roller is stopped and on the other hand, in a step of supplying supplying a washing liquid to at least the outer circumferential face of the rotation roller, the blade is enabled to reciprocate and move in the axial direction of the rotation roller. COPYRIGHT: (C)2007,JPO&INPIT
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