| 摘要 |
A TFT(Thin Film Transistor) inspecting apparatus is provided to cut an inspecting time by using a surface electron emission device array corresponding to an inspection object TFT array. A TFT inspecting apparatus includes a first electrode, a second electrode, and an insulating layer. The first electrode(101) is formed opposite to a TFT array in a first direction. The second electrode(105) is formed in a second direction. The insulating layer is interposed between the first and the second electrodes. The insulating layer is composed of a first insulating layer(102), a metal film(103) and a second insulating layer(104).
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