FLAT PANEL DISPLAY MANUFACTURING MACHINE

摘要

An apparatus for manufacturing a flat panel display is provided to reduce deformation of a chamber due to a pressure difference by disposing an airtight material on a connecting surface of upper and lower layered type load lock chambers. Upper and lower load lock chambers(100a,100b) are mutually coupled by plural bolts(B) that are coupling units. An O-ring of an airtight material(O) is disposed along an edge of a connecting surface of the upper and the lower load lock chambers. A decompressing unit(104) exhausts air from a separating space in the airtight material disposed on the connecting surface of the upper and the lower load lock chambers. The decompressing unit is formed at an end of a decompressing line(102). The decompressing line is connected to the airtight material through a sidewall of the upper load lock chamber.