| 摘要 |
An apparatus for manufacturing a flat panel display device and a method thereof are provided to reduce a foot print by eliminating a stage transmitting substrates of a cassette to a loader, and minimize time for transmitting the substrates. A cassette(100) contains a plurality of substrates(1). A stocker has a shelf(210) for securing the cassette. A process proceeding unit receives each substrate of the cassette for proceeding with a process. A loader includes at least two or more hand parts and is placed between the stocker and the process proceeding unit for receiving each substrate of the cassette kept in the stocker. At least one or more unloading units(300) unload each substrate from the cassette for providing the unloaded substrate to each hand part.
|
