发明名称 HEATER AND ELECTROSTATIC CHUCK
摘要 A heater is provided to improve the reliability of electrical connection between a connector and a conductive member and between a connector and an electrode by including a connector receiving physical force in a plate direction and by completely sealing a connection portion between the connector and the conductive member from the external surroundings. An opening(112) is formed in an insulation plate(110). A conductive member(115) is built in the insulation plate, partially exposed through the opening. A connector(130) is inserted into the insulation plate through the opening so as to transfer power to the conductive member wherein a pressurizing part(135) is formed in the outer circumferential surface of the connector. A casing(140) is inserted into the outer circumferential surface of the connector, closely attaching the connector to the conductive member while pressurizing the pressurizing part in the direction of the conductive member. Adhesive(150,260) is formed between the inner surface of the opening and the connector, between the inner surface of the opening and the casing and between the connector and the casing so as to seal the inside of the opening.
申请公布号 KR20070071577(A) 申请公布日期 2007.07.04
申请号 KR20050135163 申请日期 2005.12.30
申请人 KOMICO LTD. 发明人 LEE, SEONG MIN;SEO, JIN WEON;LEE, WON HAENG
分类号 H01L21/00 主分类号 H01L21/00
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