| 摘要 |
An interferometer using vertical-cavity surface-emitting lasers is provided to applying a single mode VCSEL to an interferometer instead of He-Ne laser and an edge emitting laser to reduce the number of optical components. An interferometer using vertical-cavity surface-emitting lasers includes a substrate(303) having a transmitting lattice(304) and a reflective lattice(306), formed on a side thereof. A VCSEL(301) is easily surface-mounted so that a solder bump(302) is surface-mounted on a surface opposite to a surface of the substrate where the lattices are formed. Between the VCSEL and the substrate, the optical alignment is needed only once, and cost for packaging can be reduced due to a large alignment allowance tolerance. Light emitted from the VCSEL passes through the substrate and meets a transmission lattice marked on the surface of the substrate. The transmission lattice splits an incident light into 0th order beam and a first order diffracted beam, and a shape and a period of the lattice determine intensity and angle of the first order diffracted beam.
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