发明名称 |
Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system |
摘要 |
A sample processing apparatus having a main unit for processing a sample, a recorder for recording information of an operation in the main unit as predetermined data, which information includes a plurality of data corresponding to outputs of a plurality of sensors installed on the main unit, and a display unit for displaying each of the data corresponding to outputs of the sensors simultaneously.
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申请公布号 |
US2004078946(A1) |
申请公布日期 |
2004.04.29 |
申请号 |
US20030689594 |
申请日期 |
2003.10.22 |
申请人 |
NAKAMOTO SHIGERU;KONDO HIDEAKI;ARIMA JUNTARO |
发明人 |
NAKAMOTO SHIGERU;KONDO HIDEAKI;ARIMA JUNTARO |
分类号 |
G05B23/02;H01L21/00;(IPC1-7):H01L21/00 |
主分类号 |
G05B23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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