METHOD AND EQUIPMENT OF SURFACE DEFECT DETECTION GLASS

摘要

A method for detecting a substrate defect and an apparatus for the same are provided to minimize the interference of lights except for the light used as a light source and flexibly test according to various patterns on a substrate. A apparatus for detecting a substrate defect includes an illumination unit(100), an imaging unit(300), and an optical material unit. The illumination is installed on the top or the bottom of the substrate to detect light with at least one luminary. The illumination unit comprises a plate layer formed to be laminated by a plurality of light emitting bodies and a plurality of optical materials. The imaging unit is installed on a position of corresponding to the illumination unit to receive the light detected from the illumination unit. The optical material unit comprises at least one optical material to control a wave direction of the light by being installed between the illumination unit and the camera unit.