发明名称 Capacitor and Manufacturing Method Thereof
摘要 A capacitor capable of being formed in a vertical plane without an additional mask process and/or deposition process and a method of manufacturing the same are provided. The capacitor includes: a first conductive line formed on a substrate; a first interlayer dielectric including a first via hole formed at an upper portion of the first conductive line, and a second and third via hole pair formed at a region of the substrate; a first barrier metal layer and a contact plug formed in the first via hole; and first and second capacitor electrodes formed in the second and third via holes, respectively. The first and second capacitor electrodes and the first interlayer dielectric disposed between the first and second capacitor electrodes form a vertically constructed capacitor.
申请公布号 US2007146963(A1) 申请公布日期 2007.06.28
申请号 US20060616302 申请日期 2006.12.27
申请人 GO HAN S 发明人 GO HAN S.
分类号 H01G2/00 主分类号 H01G2/00
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