| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an electroluminescent device wherein bad influence caused by foreign substances adhering when forming an auxiliary electrode is prevented. SOLUTION: This manufacturing method is equipped with a process to paste a photosensitive dry film on a substrate 20 through a thermally foaming resin so as to cover the auxiliary electrode 115 on the substrate 20 with it, a process to pattern the photosensitive film by exposing and developing it by making it correspond to the pattern of the auxiliary electrode 115, a process to pattern the thermally forming resin by using a pattern 61a made of the photosensitive dry film as a mask, a process to form a light emitting functional layer 110 in a pixel region X by depositing the formation material of the light emitting functional layer 110 on the substrate 20 by a vapor phase deposition method so as to cover the pattern 61a, and a process to expose the auxiliary electrode 115 by heating the pattern 60a of the thermally foaming resin to foam it and peeling off the pattern 61a comprising the pattern 60a and the photosensitive dry film. COPYRIGHT: (C)2007,JPO&INPIT
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