METHOD FOR PATTERNING ZINC OXIDE TRANSPARENT CONDUCTIVE FILM
摘要
<p>Disclosed is a method for patterning a zinc oxide transparent conductive film which enables to improve patterning characteristics by controlling the etching rate of the zinc oxide transparent conductive film. Specifically, when a zinc oxide transparent conductive film, which mainly contains zinc oxide while additionally containing at least one element selected from group IV elements of the periodic table, is patterned by etching, the zinc oxide transparent conductive film is treated with water before the etching step.</p>
