| 摘要 |
An apparatus for opening/closing a pod cover of an SMIF(Standard Mechanical InterFace) apparatus is provided to prevent failure in processing and to take actions against an abnormal pod cover by enhancing the exactness of opening/closing operations of the pod cover and checking easily the malfunction of the pod cover in the opening/closing operations. An apparatus for opening/closing a pod cover of an SMIF apparatus includes a latch, a latch rotating unit, a detecting member, close/open sensors, and a latch opening/closing control unit. The latch(110) is installed on a port plate. The latch includes a hook portion(112) capable of closing and opening a pod cover. The latch rotating unit(120) is used for rotating the latch. The detecting member(130) is installed at a side of the latch. The close/open sensors(140,150) are capable of outputting close/open signals according to the rotation of the latch. The latch opening/closing control unit is used for controlling the latch rotating unit according to the close/open signals of the close/open sensors. The detecting member is composed of first and second detecting bars(131,132), wherein the first and second detecting bars are detected by the close/open sensors, respectively.
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