ELECTRON EMISSION ELEMENT MANUFACTURING METHOD, DISPLAY UNIT MANUFACTURING METHOD, AND DISPLAY UNIT WITH ELECTRON EMISSION ELEMENT CLEANING FUNCTION

摘要

The invention relates to a method of manufacturing an electron emission element, having a step of forming a pair of element electrodes on a rear plate, a step of forming a conductive film to connect the element electrodes, and a forming process of forming an electron emitter on a conductive film by applying power to the element electrodes. The method has an impurities elimination process for eliminating impurities adhered to an electron emitter, by giving element electrodes a voltage of polarity opposite to that in ordinary operation in a vacuum atmosphere, through a baking process, after carbon is adhered to an electron emitter by an activation process. The impurities adhered to the electron emitter can be securely eliminated by performing the impurities elimination process, without using an exclusive processor.