发明名称 Method of producing a semiconductor device, and wafer-processing tape
摘要 A wafer-processing tape, having a removable adhesive layer( 2 ), and an adhesive layer ( 3 ), formed on a substrate film( 1 ), wherein the tape is used in a process involving the steps of: grinding a back face of a wafer circuit substrate ( 5 ) having convex-type metal electrodes ( 4 ), and dicing the wafer circuit substrate into chips, in a state that the tape is adhered to the wafer circuit substrate; and picking up the chips, in which the chips are picked up in a state that the adhesive layer ( 3 ) is peeled from the substrate film ( 1 ) but is bonded to the individual chip.
申请公布号 US2007141330(A1) 申请公布日期 2007.06.21
申请号 US20070700142 申请日期 2007.01.31
申请人 THE FURUKAWA ELECTRIC CO., LTD. 发明人 MORISHIMA YASUMASA;KITA KENJI;ISHIWATA SHINICHI;YAMAKAWA TAKANORI
分类号 B32B37/12;B32B7/12;B32B15/04;B32B38/04;B32B38/10 主分类号 B32B37/12
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