APPARATUS AND METHOD FOR MEASURING MINUTE FORCE, AND PROBE FOR MEASURING MICRO SURFACE PROFILE

摘要

PROBLEM TO BE SOLVED: To provide a probe for measuring micro surface profile capable of finely adjusting the contact pressure better than before.

SOLUTION: The probe for measuring micro surface profile comprises: a probe shaft 4 provided with a contact 2 for bringing into contact with an object 1 to be measured; a probe main body 21 provided with a supporting means for supporting a probe shaft 4 movably with non-contact; an energizing device for energizing and moving the probe shaft 4 to the object 1 to be measured; a piezoelectric sensor 8a assembled in the probe main body 21 so as to act the reaction to the energizing force imparted to the probe shaft; the load detection part 8b for measuring the load acting to the piezoelectric sensor; a controller 9 for controlling the energizing force by the energizing device based on the load detected by the load detection part; and a deformation amount measuring device for measuring the position of contact 2 being in contact with the object 1 to be measured with the energized force adjusted by the control part 9.

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