TEMPERATURE SENSOR FOR CLEANING FLUID VESSEL

摘要

PROBLEM TO BE SOLVED: To provide a temperature sensor for a cleaning fluid vessel capable of preventing spreading of fine fragments into cleaning fluid even when a quartz tube having a temperature-measuring element arranged inside is broken by any chance, and performing always stable temperature measurement without reducing a response characteristic of the temperature-measuring element. SOLUTION: The temperature sensor 1 is constituted by arranging the temperature-measuring element 3 inside a tip blocking part 2a of the quartz tube 2 to be immersed into the cleaning fluid in the cleaning fluid vessel. The sensor 1 has a constitution wherein close coating of a fluororesin film 9 is performed on the whole surface outside the quartz tube 2. COPYRIGHT: (C)2007,JPO&INPIT